MKS

The MKS piMFC is an innovative pressure disturbance insensitive mass flow controller used to control gas flow in the semiconductor fabrication process. Cooper Perkins contributed to the original concept, developed the specifications, designed the mechanical, electrical, and software, assisted in testing, and helped transition the product to manufacturing. Cooper Perkins developed a custom operating system specifically for this application running on a TI hybrid DSP/ARM7 processor. The OS features a custom TCP/IP stack for control, diagnostics data handling via an Ethernet port, and a graphical user interface accessible via any Ethernet connection.